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เครื่องวัดความเรียบผิว Taylor Hobson Form Talysurf Inductive/WRiจากประเทศอังกฤษ
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Form Talysurf Inductive/WRi
รายละเอียด:
เครื่องวัดความเรียบผิว Taylor Hobson Form Talysurf Inductive/WRi จากประเทศ อังกฤษ.
Specifications
Horizontal Performance
Traverse length-X Max/Min : 60mm/0.1mm, 120mm/0.1mm, 200mm/0.1mm (2.4in/0.004in, 4.7in/0.004in, 7.9in/0.004in)
Traverse/measuring speeds : 110mm/s max -- 0.1mm/s, 0.25mm/s, 0.5mm/s &1mm/s((0.39in/s max -- 0.004in/s, 0.01in/s, 0.02in/s &0.04in/s))
Minimum data sampling interval in X : 0.125µm[0.1mm to 120mm length](5µin [0.004in to 4.7in])
Straightness uncertainty (Pt) : 0.5µm/60mm, 0.5µm/120mm, 0.75µm/200mm (20µin/2.4in, 20µin/4.7in, 30µin/7.9in)
Straightness repeatability(PV) : 0.15µm(6µin), 0.15µm(6µin), 0.2µm(8µin)
Vertical Performance
Nominal measuring range (Z) : Range 1 = 1mm(0.04in), Range 2 = 0.2mm(0.008in)
Resolution (Z) : Range 1 = 16nm (0.63µin), Range 2 = 3.2nm (0.13µin)
Range to resolution ratio : 65,536 : 1
Stylus arm length, tip size, force : 60mm arm, 2µm radius conisphere diamond, 1mN force
Z axis non-linearity : (0.05 Z [mm]) µm (50 Z [inches]) µin - after calibration (Z = gauge displacement)
Repeatability of Z axis indication : Flat surface - 0.05µm (2.1µin), Curved surface - 0.05µm (2.1µin)
System Performance
Spherical calibration artifact : 2.5mm (0.49in) nominal radius standard
Calibration Pt : 0.25µm (10µin)
System noise-Rq : Range 1 = 15nm (0.6µin), Range 2 = 8nm (0.3µin)
Radius measurement uncertainty : 0.1 - 22mm (0.004 - 0.87in) = 1% to 0.015% of nominal, 22 - 1000mm (0.87 - 39.4in) = 0.02% to 0.1% of nominal
Inclination measurement uncertainty : 0.5 arc minute uncertainty (+ / - 35º maximum range)
Dimensions L x D x H (traverse unit) : 410x130x225mm / 410x130x225mm / 470x130x225m, (16x5.2x8.9in) / (16x5.2x8.9in) / (18.5x5.2x8.9in) (granite base) : 760x500x120mm (30x204.7in)
Weight (traverse unit) : 13.5Kg (30lbs) / 13.5Kg (30lbs) / 15Kg (33lbs)
Motorized vertical column : 450mm (17.7in) vertical traverse
Environmental cover : Optional
Environment
Storage temperature : 5ºC to 40ºC (41ºF to 104ºF)
Storage humidity : 10% to 80% Relative, non condensing
Operating temperature : 18ºC to 22ºC (64ºF to 72ºF)
Temperature gradient : <2ºC (<3.6ºF) per hour
Operating humidity : 45% to 75% Relative, non condensing
Maximum RMS floor vibration : 2.5µm/s (100µin/s) at <50Hz, 5.0µm/s (200µin/s) at >50Hz
Electrical supply
Supply type : Alternating supply, single phase with earth (3-wire system)
Instrument and computer voltage : 90V - 130V or 200V-260V (switch selectable)
Frequency : 47Hz to 63Hz
Supply voltage transients - width : EN 61000 - 4 - 4:1995
Power consumption : 500VA
Safety : EN 61010 - 1 : 2001
EMC : EN 61000 - 6 - 4 : 2001, EN 61000 - 6 - 1 : 2001
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