เครื่องวัดความเรียบผิว Taylor Hobson Form Talysurf PGI จากประเทศ อังกฤษ.
Specifications
Horizontal Performance
Traverse length-X Min / Max : 120/200mm (0.1mm)
Traverse/measuring speed : 10mm/s max-0.1mm/s,0.5mm/s & 1mm/s
Data sampling interval in x : 0.125um
Straightness uncertainty (Pt) : 0.35um over 120/200mm
Vertical Performance
Nominal measuring range (Z) : 4/8/12.5mm
Resolution (Z) : 3.2nm@4/8/12.5mm range, [email protected]/12.5mm range
Range to resolution ratio : 1,250,000/2,500,000/10,000,000/3,906,250/15,625,000: 1
Stylus arm length, tip size, force : 60mm arm, 2 um radius conisphere diamond stylus, 1mN force
: 120mm arm, 0.5mm radius ball, 20mN force
Z axis non-linearity : (0.07+0.03 Z (mm)) um
System Performance
Standard Spherical calibration artifact : 22/80mm nominal radius
Calibration Pt : 0.15/0.2um (60mm stylus arm)
System noise-Rq : 5/3/2nm
Radius measurement uncertainty : 0.1- 80mm = 1- 0.005% of nominal
80-1000mm = 0.005-0.1% of nominal
1000-2000mm = 0.1% of nominal
Inclination measurement uncertainty : 0.5 arc minute uncertainty (+/-35° maximum range)
Motorized vertical column : +/- 9° from horizontal
Dimensions L x D x H (granite base) : 760 x 500 x 120mm
Dimensions L x D x H (traverse unit) : 410 x 130 x 225mm / 470 x 130 x 225m
Weight : Traverse unit – 13.5 / 15Kg
Analysis
Primary parameters : Pa, Pc, Pda, Pdc, Pdq, PHSC, Pku, Pln, Plo, Plq, Pmr(c), Pmr, Pp, PPc, Pq, PS, Psk, Psm, Pt, Pv, Pvo, Pz, Pz(JIS)
Roughness parameters : R3y, R3z, Ra, Rc, Rda, Rdc, Rdq, RHSC, Rku, Rln, Rlo, Rlq, Rmr(C), Rmr, Rp, Rp1max, Rpc, Rq, RS, Rsk, RSm, Rt, Rv, Rvo, Rv1max, Rz, Rz(DIN), Rz(JIS), Rz1max
Waviness parameter : Wa, Wc, Wda, Wdc, Wdq, WHSC, Wku, Wln, Wlo, Wlq, Wmr(C), Wmr, Wp, Wpc, Wq, WS, Wsk, Wsm, Wt, Wv, Wvo, Wz
Rk Parameters : A1, A2, Mr1, Mr2, Rk, Rpk, Rvk
R+W Parameters : AR, AW, Pt, R, Rke, Rpke, Rvke, Rx, Sar, Saw, Sr, Sw, W, Wte, Wx
Filter / Bandwidths : Gaussian, ISO 2CR / 300:1, 100:1 and user defined
Cut-offs : 0.08, 0.25, 0.8, 2.5 and 8mm as well as user designated cut-offs
Environment
Storage temperature : 5°C to 40°C (41°F to 104°F)
Storage humidity : 10% to 80% Relative, non condensing
Operating temperature : 18°C to 22°C (64°F to 72°F)
Temperature gradient : < 2°C (<3.6°F) per hour
Operating humidity : 45% to 75% Relative, non condensing
Maximum RMS floor vibration : 3um/s at < 50Hz, 6um/s at >50Hz
Supply type : Alternating supply, single phase with earth (3-wire system)
Instrument and computer voltage : 90V – 130V or 200V – 260V (Switch selectable)
Supply voltage transients – width : Not less than 2us and not greater than 20 us
Power consumption : 500VA
Safety : EN 61010-1: 2001
EMC : EN61000-6-4: 2001, EN 61000-6-1: 2001