รายละเอียด:
The Multiposition Wafer Probe has the ability to probe 1, 5, 9, or somewhat more positions on multiple wafers with 1mm positioning repeatability from wafer to wafer. It is not motorized, but requires that the user moves the wafer stage by hand. It is available with either a 6? (150mm) wafer chuck or an 8? (200mm) wafer chuck.
Multiposition Wafer Probe Specifications:
Wafer Chuck – Hard anodized aluminum alloy with vacuum hold, centering grooves, and tweezer notch for: 6? model – 3?, 4?, 5? and 6? wafers, 8? model – 5?, 6?, and 8? nominal diameters.
6? Model Preset Measurement Postions: Center and four radii at right angles 15, 20, 25, 35, 50, and 60mm
8? Model Preset Measurement Postions: Center and four radii at right angles 32, 38, 50, 57, 68, and 94mm
Services: Vacuum line or pump required
Dimensions: 355 x 215 x 195mm high
Net weight: 6? model – 3.5kg, 8? model – 4.0kg
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