Electrostatic Chuck Supply

Trek’s Model 646 software-driven Electrostatic Chuck Supply

Output Phasing:
                       Voltage A (Reference Phase) 0 to ±3 kV
                       Voltage B (Phase B = [-1] x Phase A) 0 to ±3 kV  
Output Voltage Range: 0 to ±3 kV
Output Current Range: 0 to ±6.5 mA DC