G-TRAN Series Atmospheric Pirani Gauge SW1
This is a wide range pirani vaccum gauge which measures from atmospheric pressure to 5 x 10-2 Pa. In addition, this gauge removes control and display panels from traditional controllers, keeping the minimum necessary functions only, thus saving cost and space.
- Features
•Measures from atmospheric pressure to 5 x 10-2 Pa.
•Combined sensor and controller, thus reducing cables, saving space and energy.
•Operates with DC 24V input
•Pressure is 0 to 10V Log output
•LED Error verification for better visibility
•Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.
•Sensor unit can be replaced easily.
•2 set points output (SW1-1)
•RS232C/RS485 communication (only SW1-2)
•Conforms with CE
- Applications
•Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.
•Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.
•Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.