Siargo" Mass Flow Sensors

Siargo" Mass Flow Sensors
FS4001 MEMS Mass Flow Sensor

Features:

Low mass flow ranges from 0-30 sccm up to 0-1000 sccm
Fast response time of 4 ms (selectable)
Pressure rating up to 5 bar (73 psi)
Accuracy of ±1.5%
Outputs include linear analog 0.5 - 4.5V or digital RS232
Measures 62 x 52 x 12.8 mm3